Excimer Laser Optics

  • 126 to 352 nm
  • Highest Laser durability in the world
    •  28J/cm2 at 248 nm, 15 ns (KrF Laser mirror)
  • High reflectance
    • R>95% at 157 nm, vertical incidence
  • Superior stability
    • Spectrum variance <0.2% at 193 nm